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Through special design, this lens can not only realize the full field clear imaging of tilted objects, but also realize high-precision large depth of field measurement perpendicular to the inclined plane. At the same time, the mechanical complexity of the system is not increased, and the response time is short,which can meet the needs of rapid measurement.

In the test, the liquid oblique telecentric lens and liquid telecentric lens of the same specifications focus on the front and back foot of the chip by the built-in liquid lens, and the response time is in the order of milliseconds.According to the comparison of test results, the liquid oblique telecentric lens can achieve a clear image of the front foot or the back foot in a single focus with an appropriate tilt setting. However, due to the limitation of depth of field during oblique shooting, liquid telecentric lens needs at least 4 times of focusing and image synthesis to achieve the overall clear image of the end foot.Therefore, the liquid oblique telecentric lens can be used to detect chip end pins, which can greatly improve the test efficiency.